The ZEISS Merlin FE SEM has nano-scale image and micro-and cryo-EDS analytical capabilities. The MERLIN combines ultra-fast analytics and high resolution imaging and is capable of a wide range of beam flexibility, from a voltage of 20V to 30kV and beam currents of 7pA to 40 nA, as well as resolutions of up to 0.6 nanometers at 30kV and 1.6 nanometers at 1kV.

The system is fitted with a number of detectors for imaging, including: an in-lens and chamber secondary (SE) detectors (nano & micron-scale imaging), an in-column energy selective backscattered (ESB) electron detector, a retractable 5 diode backscattered electron detector (BSD) (nano-BSE & 5-diode detector nano to micron imaging), a cathodoluminescence (CL) detector and a scanning transmission electron microscopy (STEM) detector with a resolution of 0.6 nanometer.

EDX (Elemental phase mapping, linescans, spot, cryo, feature & automate analysis)

Analytical capability is provided by the Oxford Instruments XMax 20mm2 detector for high resolution spectra and high spatial resolution maps using energy dispersive X-ray spectrometry (EDS). Furthermore, the instrument has a Quorum cryostage for micro-quantitative analysis of beam sensitive samples, as well as a facility for local charge compensation (CC) for the analysis of insulating samples.